ポスター発表
- 第2日 5月16日(火) P会場(ホワイエ,会議室1004-1007)
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2P-56 PDF
帯電液滴衝撃/二次イオン質量分析法による合成高分子/シリコン積層試料の分析
Among various types of cluster secondary ion mass spectrometry (SIMS), electrospray droplet impact/secondary ion mass spectrometry (EDI/SIMS) is unique due to its high ionization efficiency and non-selective atomic/molecular-level surface etching ability. In this study, EDI/SIMS was applied to synthetic polymers of polystyrene (PS) and poly(9,9-di-n-octylfluonyl-2,7diyl) (PFO) spin-coated on a silicon substrate.